8D Photonics Mapping System
Cooldown measurement on a 150mm wafer in the 8D Photonics Wafer Mapping System. Here we show temperature measurements at three locations during cooldown (Wafer Center, Wafer Edge, and on the temperature controlled Wafer Stage). Surface temperatures were monitored with silicon diodes. In general the wafer surface temperature tracks the Wafer Stage setpoint within ~2 K and a T = 28 K base wafer surface temperature can be achieved.
8D IR Pioneer
The 8D IR Pioneer wafer mapping system can be installed on your existing optical table and fits nicely in a 3’ x 6’ area. Our entire closed-cycle cryostat and measuring system is contained in a laser safety enclosure. Vibration isolation allows the mapping system to coexist with a FTIR spectrometer on the same table for photoluminescence measurements of your materials.
